● CHARACTERISTIC 

- Designed for AMHS(Automated Material Handling System) 

- Possible to Open/Close by LOAD PORT (SEMI Size62(FIMS)) 

- Designed for Operators easy process 

- Use 0.2㎛ filter to prevent Particles 

- Use the best material for durability at the point which contact with Ring-Frame 

● SPECIFICATION​

- WEIGHT 4.2Kg, PITCH 9.5mm

​- W 419mm D 343mm H 336mm​