● 300mm Front Opening Unified Pod
● CHARACTERISTIC
- Based on FIMS SEMI, compatible with AMHS(OHT, AGV, RGV)
- Designed with light and human-frendly for convenient
- Use conductive material - protect particles from ESD(E4 ~ E9)
- Available to use long-term(3~5years) with using good qualitied materials
● SPECIFICATION
- SEMI STANDARD : E47.1 E1.9 E15.1 E57 E62 S8
- WEIGHT 4.2Kg, PITCH 10mm
- W 419mm D 343mm H 336mm