Auto & manual Machine FOSB are designed in accordance with
SEMI standard and considering the working environment of CHIP
MAKER. In addition, OHT and RFID transport support is also
available. In consideration of the operator’s convenience, it is
designed to be able to open and close manually. Also, it uses threedimensional
side handles to make carrying easy.
(Wafer storage quantity) : 25sheets
(Width) : 385mm
(Length) : 351mm
(Height) : 327.5mm
(Weight) : Empty - 4.3kg
With wafer - 7.3kg
● Product Compatibility
Secure compatibility of facility based on SEMI (E15.1,
E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.