3S Korea has enabled to respond a single model of FOSB to
chipmaker for the first time in Korea. Developed as a proprietary
product, it is now being delivered to domestic chip maker. Except
for some special process line, our FOSB can mostly cope with auto
and manual machine. In addition, top flange for OHT (overhead hoist
transporter) is available as an option.
(Wafer storage quantity) : 25sheets
(Width) : 387.3mm
(Length) : 344.5mm
(Height) : 328mm
(Weight) : Empty - 4.2kg
With wafer - 7.2kg
Secure compatibility of facility based on SEMI (E15.1, E62,
E63, E64, E110, E83, E84, E85, E99, E144) SPEC.