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3S KOREA

To Create Future Value 3S KOREA

To create future value company 3S KOREA

Business

Wafer Carrier Business

300mm FOSB(model.V2)

Product description
3S Korea has enabled to respond a single model of FOSB to
chipmaker for the first time in Korea. Developed as a proprietary
product, it is now being delivered to domestic chip maker. Except
for some special process line, our FOSB can mostly cope with auto
and manual machine. In addition, top flange for OHT (overhead hoist
transporter) is available as an option.

●Specification
(Wafer storage quantity) : 25sheets
(Width) : 387.3mm
(Length) : 344.5mm
(Height) : 328mm
(Weight) : Empty - 4.2kg
With wafer - 7.2kg

●Product Compatibility
Secure compatibility of facility based on SEMI (E15.1, E62,
E63, E64, E110, E83, E84, E85, E99, E144) SPEC.