To create future value company 3S KOREA
● CHARACTERISTIC
- Designed for AMHS(Automated Material Handling System)
- Possible to Open/Close by LOAD PORT (SEMI Size62(FIMS))
- Designed for Operators easy process
- Use 0.2㎛ filter to prevent Particles
- Use the best material for durability at the point which contact with Ring-Frame
● SPECIFICATION
- WEIGHT 4.2Kg, PITCH 9.5mm
- W 419mm D 343mm H 336mm