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3S KOREA

한국어 日本語

To Create Future Value 3S KOREA

To create future value company 3S KOREA

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High-tech Material Division

High-tech Material Division

3FU300(300mm Front Opening Unified Pod)

● 300mm Front Opening Unified Pod

● CHARACTERISTIC
- Based on FIMS SEMI, compatible with AMHS(OHT, AGV, RGV)
- Designed with light and human-frendly for convenient
- Use conductive material - protect particles from ESD(E4 ~ E9)
- Available to use long-term(3~5years) with using good qualitied materials

● SPECIFICATION
- SEMI STANDARD : E47.1 E1.9 E15.1 E57 E62 S8
- WEIGHT 4.2Kg, PITCH 10mm
- W 419mm D 343mm H 336mm
Product Brochure

OPTION

  • 3FU300
    300mm 25 slot FOUP
  • 3FU300-1
    300mm 25 slot FOUP( Transparent Door)
  • 3FU300-2
    300mm 13 slot FOUP

OPTION PART

  • RFID (Horizontal)
  • RFID Holder(Vertical)
Available for purchase separately
Veiw List